Optical Systems and Chucks for Semiconductor

For the semiconductor market we offer:

• mask/reticle/wafer holder
• mask writer

• inspection systems

               

We serve the market with development, design and production of high precision key components, lens systems, objectives and clean room assembling and adjustment of complete modules and sub-systems.

It starts with our customers' idea and the fully understanding of our customers' needs, in-house feasibility and specification, design and prototyping and - after a final design review - it results in manufacturing and management of after-sales services for our customers.

Fast, flexible, competent and reliable.

• We provide highly precise optics and opto-mechanical systems for the lithography market including stages for wafers and masks.
• We produce complex assemblies for back-end and front-end applications, for excimer lasers, mask and wafer inspection systems.
• We support the next generation of lithography tools by producing vacuum and electrostatic chucks for a wide range of different applications.

At a glance:

• Extraordinary high flatness
• Deterministic polishing techniques using computer controlled polishing, magneto-rheological finishing or ion-beam-figuring
• Light weighting up to 95% depending on material
• cooling structures, anti sticking coatings/structures
• anodic bonding