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| BERLINER GLAS: Technical know-how for new EUVL-Chucks |
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| 2003-10-01 |
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As a manufacturer of electrostatic chucks for a wide range of different applications, Berliner Glas is supporting the development of standards for electrostatic chucks.
For EUV-Lithography, especially the SEMI draft standard 3419 is very promising. The SEMI draft standard allows measurement and production of electrostatic clamps for different customers with one tool set. This would significantly reduce costs especially for customers with smaller production.
The technical know-how of Berliner Glas enables the company to achieve an extraordinary high flatness from 20 nm PV at dimensions of 150x150 mm by the use of deterministic polishing techniques like Computer Controlled Polishing or Ion Beam Figuring.
The material which should be used can be zero thermal expansion materials or silicon adapted thermal expansion materials where light weighting and cooling structures can be included.
The general, design versions of uni-polar and multi-polar chucks can be realized (multiple layers). |
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Deutsche Version
