|
|
 |
Modules and Components for Excimer Lasers
|
| 2002-08-19 |
 |
Using CaF2 BERLINER GLAS produces optics of up to 4 inches or 101,6 mm in size which meet highest requirements in planity. CaF2 optics are predominantly destined for the use in excimer lasers in the semiconductor industry. The treatment of optics ensures an exact laser processing by using CaF2 material for 193 nm laser.
The application of CaF2 optics assures the use of laser at high power density and energy density for the wavelength range of 193 nm. This is also contributed by surface roughness of RMS 0.4 nm and smaller, which leads to a reduction of the susceptance to failure of the substratum.
BERLINER GLAS develops high quality prisms, lenses and key plates of glass or similar materials such as CaF2, MgF2 or quartz. Beyond that BERLINER GLAS assembles and manufactures complex modules and electrooptical assemblies for the use in Excimer Lasers.
From development of optical and mechanical design through production, clean room mounting and adjustment up to customized measuring set ups - everything is from one source BERLINER GLAS.
BERLINER GLAS guarantees highest quality in optical components for lasers. |
|
|
|
Deutsche Version
