For more than ten years, BERLINER GLAS has produced wafer chucks for state-of-the-art lithography systems – especially for immersion lithography, as well as critical reticle chucks.

Our engineering department has worked on chuck development for years. Test parts and prototypes are made in the R&Dlab facilities and production parts in our state-of-the-art factory.

Our designers are trained in chuck principles and mathematical modelling of chuck behaviour, material choice and testing, mechanical and thermal design, coating design choice and testing as well as electric control circuitry.

              

• Functional tests in a stack
• Use of high precision reference wafers and reference reticles
• Chuck and wafer cleaning to prove flatness’s of 100 nm global and 2 μrad local
• 12” interferometer with vertical beam direction
• Phase shifting interferometers up to 24” with horizontal beam and 12” vertical beam
• Custom software for application specific local flatness evaluation available
• Electrical control