| Wavefront | Interferometer 4-24”, Shack-Hartmann-Wavefront-Sensor (UV and DUV) |
| Form deviation | 3D Coordinate-Measurement, caliper, CCD-Micrometer, Stitching interferometer |
| Angle precision | Goniometer, interferometer |
| Transmission/reflection | Spectrophotometer, diode array |
| Surface defects | Automatic traveling microscope |
| Micro-roughness | White light interferometer, AFM |
| Imaging performance/resolution | Computer supported MTF measurement, microscope picture resolution test |
| Centering | Objective metrology station, Laser centering station |
| Additional functional measurement | Assembly-specific metrology station |
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Metrology
Interferogram
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Metrology is an imortant step in our production process. High quality requires constant control and therefore, individual development of appropriate measurement set-ups and sofware adaptation is a matter of course. With comprehensive instrumentation technology, we always try to meet our customer's individual profile. |
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© Copyright 2007 BY BERLINER GLAS |