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Plano Optics - Technical Data

Plano optics / Planoptik
Plano optic, coated
  • Dimensions: up to max. 600 mm ø in different shapes
  • Flatness: up to Lambda/30 PV, measured at 632.8 nm according ISO 10110
  • Parallelism: better one angular second (1")
  • Micro-roughness: up to 2Å rms
  • Surface defects : up to 5/1 x 0.004 according to ISO 10110

CNC-Shaping

opto-mechanical key component Halbleiterindustrie
Plano key component for semiconductor industry
  • Outside dimensions: up to 950 mm x 750 mm in any thickness
  • Repeating accuracy: up to ±0.003mm
  • Dimensional variations: up to ±0.005 mm (ISO tolerances IT5)
  • Path controlled shapes: any radius or shape which is digitized and described mathematically
  • Inside shapes: bores up to 0.25 mm, steps, elongated holes, pockets, grooves and indentations of any size
  • Edges: half-round edges, seamed and ground edges, bevels at any angle
  • Deep drilling: up to 500 mm, ø 3-40 mm

Some typical plano-optical components

Planoptik / Plano optics
Plano Optic
  • Filters
  • Plano-parallel plates
  • Wedges
  • Dove prisms
  • Pentaprisms
  • Roof prisms
  • Schmidt/Pechan prisms
  • Windows
  • Corner cubes
  • Beamsplitting plates & cubes
Optical Assembly
PHOTONICS+SYSTEMS
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Wafer Chucks Datasheet

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