Berliner Glas has many years of experience and extensive expertise in developing and manufacturing innovative chuck solutions for the various processing steps in the semiconductor industry.
These vacuum chucks and electrostatic clamps are individually designed and manufactured and must all meet different requirements. Berliner Glas knows the possibilities to achieve the various specifications and to implement the ideal solution for every customer.
Under the title “Perfecting Chucks”, Berliner Glas has published several documents that describe the different approaches and tests that lead to meeting the challenging specifications of the semiconductor equipment industry.
You will find these documents below:
Information
PERFECTING CHUCKS: CUSTOMIZED PIN PATTERNS
PERFECTING CHUCKS: VACUUM CHUCKING FOR WARPED WAFERS
White Papers
PERFECTING CHUCKS: WAFER BACKSIDE PARTICLE REDUCTION
PERFECTING CHUCKS: CLAMPING FORCE AND FLATNESS
Rapid prototyping and test center for shortening development cycles
Test center for checking the basic principle of chuck design early in the development phase
Berliner Glas offers customers the opportunity to test and evaluate the chuck design early in the development process. We use rapid prototyping to produce test parts, which are checked and evaluated together with the customer in the test center at the Berlin location. All the necessary measurement and test systems are available in the clean rooms of this test center. The results and experience achieved through the joint tests are taken into account in the final chuck design. This procedure optimizes product properties and at the same time shortens development cycles.
If you have a specific challenge, please send us an email: chucks [at] berlinerglas.de or contact your contact person directly.
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Berliner Glas KGaA Herbert Kubatz GmbH & Co.
Waldkraiburger Straße 5
12347 Berlin, Germany
Fon +49 30 60 905-0
info [at] berlinerglas.de