Perfecting Chucks. Chucks and Clamps for every application.

Berliner Glas has many years of experience and extensive expertise in developing and manufacturing innovative chuck solutions for the various processing steps in the semiconductor industry.

Chucks and clamps for the semiconductor equipment industry

These vacuum chucks and electrostatic clamps are individually designed and manufactured and must all meet different requirements. Berliner Glas knows the possibilities to achieve the various specifications and to implement the ideal solution for every customer.

Under the title “Perfecting Chucks”, Berliner Glas has published several documents that describe the different approaches and tests that lead to meeting the challenging specifications of the semiconductor equipment industry.

You will find these documents below:

Information

PERFECTING CHUCKS: CUSTOMIZED PIN PATTERNS

PERFECTING CHUCKS: VACUUM CHUCKING FOR WARPED WAFERS

White Papers

PERFECTING CHUCKS: WAFER BACKSIDE PARTICLE REDUCTION

PERFECTING CHUCKS: CLAMPING FORCE AND FLATNESS

Rapid prototyping and test center for shortening development cycles

Test center for checking the basic principle of chuck design early in the development phase

Berliner Glas offers customers the opportunity to test and evaluate the chuck design early in the development process. We use rapid prototyping to produce test parts, which are checked and evaluated together with the customer in the test center at the Berlin location. All the necessary measurement and test systems are available in the clean rooms of this test center. The results and experience achieved through the joint tests are taken into account in the final chuck design. This procedure optimizes product properties and at the same time shortens development cycles.

If you have a specific challenge, please send us an email: chucks [at] berlinerglas.de or contact your contact person directly.